SEMI標(biāo)準(zhǔn)軟件培訓(xùn)
我們?yōu)殓嫖腟DK產(chǎn)品客戶(hù)提供定制化的SEMI標(biāo)準(zhǔn)軟件培訓(xùn),可供選擇的標(biāo)準(zhǔn)包括:
I. SECS/GEM 系列
- 協(xié)議層:SEMI E4 (SECS-I) , E37(HSMS);
- 消息及數(shù)據(jù)層: E5 (SECS-II);
- 行為和場(chǎng)景: E30 (GEM);
II. GEM300 系列
- E40 (Process Job Management);
- E94 (Control Job Management);
- E87 (Carrier Management);
- E90 (Substrate Tracking);
- E116 (Equipment Performance Tracking);
- E157 (Module Processing Tracking).
III. Interface A/EDA 系列
- E120 (Commone Equipment Module);
- E125 (Equipment Self-Description);
- E132 (Client Authentication and Authorization);
- E134 (Data Collection Management);
- E164 (EDA Common Metadata);
- E179 (Protocol Buffers Common Components);
IV. Engergy Saving: 節(jié)能系列
- E167 (Specification for Equipment Energy Saving Mode Communications);
- E172 (Specification for Subsystem Energy Saving Mode Communication);
IV. 其他:
- PV2 (Guide For PV Equipment Communication Interfaces);
- HB4 (Specification of Communication Interfaces For High Brightness LED Manufacturing Equipment);
- HB13(Specification Of Susceptor For HB-LED MOCVD Equipment Communication Interface)
- A3 (Specification For Printed Circuit Board Equipment Communication Interfaces )
如果您想更進(jìn)一步了解SEMI軟件標(biāo)準(zhǔn)細(xì)節(jié),請(qǐng)通過(guò)郵件support@kxware.com和我們?nèi)〉寐?lián)系。